澳门新威尼斯8883(中国)有限公司

Types of target materials: titanium round target, titanium tube target, titanium target plate

The main performance requirements of the target material:

purity

Purity is one of the main performance indicators of the target material, as the purity of the target material has a significant impact on the performance of the thin film. However, in practical applications, the purity requirements for the target material are also different. For example, with the rapid development of the microelectronics industry, the size of silicon wafers has increased from 6 "and 8" to 12 ", while the wiring width has decreased from 0.5um to 0.25um, 0.18um or 0.13um. Previously, 99.995% of the target purity could meet the process requirements of 0.35umIC, while preparing 0.18um lines required 99.999% or 99.9999% of the target purity.